Leakage and Vacuum Test
Leakage
~ Mass Spectrometer
~ Varian Portatest II
~ He to 1 x 10 SCCS
~ Mass Flow
~ Flow section, sharp edge
orifice
~Digital Flow Meters
~1 SCCM to 400 SLM
~Positive Displacement/ Fluid Colletors
~ Collection cylinders to 2000 cc
Vacuum
~ Capability to 10 torr
~ Chamber:
~ Diameter: 24 inches
~ Height: 30 inches
~Pass through for electrical and fluid
supply
-8
-5